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Semiconductor manufacturing
- Conductive metals
W | WF6, W-amide |
---|---|
Al | DMAH, devisco-DMAH(low viscosity), TMA |
Cu | Cu(hfac)2 |
Co | CCTBA, Co(MeCp)2 |
TaN | PDMAT, PDEAT, TBTDET |
TiN | TDMAT, TDEAT |
ZrN | TDMAZ, TDEAZ |
Ta | TaCl5 |
Ti | TiCl4 |
Ni | Ni(MeCp)2, Ni(EtCp)2, Ni(dmamb)2 |
Pt | Me3Pt(MeCp) |
Pd | Pd(hfac)2 |
Ru | Ru(EtCp)2, RuCHD |
Ir | Ir(acac)2 |
- Dieletric oxide
SiO2 | TEOS, TDMASi, TDMASiH |
---|---|
Al2O3 | TMA, TEA, TMA, DMEA |
HfO2 | TDMAH, TDEAH, Hf(OtBu)4 |
La2O3 | La(tmhd)3 |
TiO2 | Ti(OiPr)4, Ti(OtBu)4, TDMAT, TDEAT |
ZrO2 | Zr(OtBu)4, TDMAZ, TDEAZ |
BST | Ba(tmhd)2, Sr(tmhd)2, Ti(OiPr)2(tmhd)2 |
PZT | Pb(tmhd)2, Zr(tmhd)4, Ti(OiPr)2(tmhd)2 |
PZT | Sr(tmhd)2. BiPh3, BiMe3, Bi(tmhd)3, Ta(OEt)5 |
- Semiconductor
III-V | TMG, TMI, TEG, TEI, TMAs, TEAs, TMSb, TESb, TMBi |
---|---|
II-VI | DMZn, DEZn, DMCd, DMSe, DESe, SeiPr2, DMTe, DETe, TeiPr2, TetBu2 |
Organic ElectroLuminescence Display (OELD)
Alq3 |
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